ASTM D5127-13(2018) PDF

$29.00

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
standard by ASTM International, 10/15/2018

Document Format: PDF

Description

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 μm. In all cases, the recommendations are for water at the point of distribution (POD).

Product Details

Published:
10/15/2018
Number of Pages:
6
File Size:
1 file , 98 KB
Note:
This product is unavailable in Russia, Ukraine, Belarus

Documents History